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Price: 1887.00 RUB
This textbook offers a detailed look into the design and operational principles of modern microsensors and microsystems, covering the key types currently in development and use. It begins by establishing a clear foundation, providing definitions for the essential terminology used within microsystem technology. The text then presents a comprehensive list of metrological parameters that characterize a microsystem as a precise measuring instrument.
A dedicated section focuses on the computer modeling and design of microsystems using the ANSYS software package. This practical approach helps bridge the gap between theoretical concepts and real-world engineering application. The material is structured for students enrolled in the “Instrument Engineering” (12.04.01) and “Nanotechnology and Microsystem Technology” (28.03.01) programs.
Priced at 1887.00 RUR, this resource is suitable for those seeking a structured academic overview of the field. It is a neutral, technical guide intended for study and reference.