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Price: 2949.00 RUB
Anatoly Ivanovich Belous – MEMS: Structures, Technologies, Applications
This comprehensive technical volume presents a detailed analysis of the current state and development prospects of microelectromechanical systems (MEMS), a rapidly evolving field at the intersection of micromechanics and microelectronics. The book is designed for a broad audience—from students, postgraduates, and educators specializing in microelectronics, to chip and electronic system design engineers, process engineers in serial production, and researchers in industrial labs and academic institutes working in radioelectronics, automotive, and aerospace sectors.
Across seventeen thematic chapters, the author systematically covers every major stage of MEMS creation using concrete examples: from analyzing typical sensor and gyroscope designs and their MEMS implementation, to manufacturing processes, packaging methods, modeling and design tools, and testing standards. Dedicated chapters explore optical MEMS (OMEMS), nanoelectromechanical systems (NEMS), and key application areas including automotive systems (anti-theft, navigation, safety, tire pressure sensors, engine management, stability control, braking), biomedical uses (bio-MEMS, surgical and ophthalmic applications, implantable sensors, intra-cardiac signal processing, EEG systems, tomography, microfluidic crystals), and RF/microwave applications.
The final chapter examines strapdown inertial navigation systems based on MEMS sensors—covering design principles, calibration methods for inertial sensing elements, and information-control systems for roll-stabilized aircraft.
Price: 2949.00 RUR